### Abstract

Original language | English |
---|---|

Pages (from-to) | 62-72 |

Number of pages | 11 |

Journal | IEEE Transactions on Plasma Science |

Volume | 38 |

Issue number | 2 |

DOIs | |

Publication status | Published - 2010 |

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### Cite this

*IEEE Transactions on Plasma Science*,

*38*(2), 62-72. https://doi.org/10.1109/TPS.2009.2037740

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*IEEE Transactions on Plasma Science*, vol. 38, no. 2, pp. 62-72. https://doi.org/10.1109/TPS.2009.2037740

**Travelling modes in wave-heated plasma sources.** / Rayner, John; Cheetham, Andrew.

Research output: Contribution to journal › Article

TY - JOUR

T1 - Travelling modes in wave-heated plasma sources

AU - Rayner, John

AU - Cheetham, Andrew

PY - 2010

Y1 - 2010

N2 - This paper describes a theoretical and experimental study of surface- and helicon-wave-heated plasma sources in which standing waves are set up in the cavity between the closed end plate to a plasma vessel and a wave launcher while travelling waves propagate from the opposite side of the launcher into a region which is long compared with the attenuation distance of the waves. We model the situation as a lossy transmission line of finite length coupled at the launcher to a lossy transmission line of infinite extent. RF power applied to the launcher divides in the ratio of the input impedances of the two transmission lines. For a conducting end plate, the power delivered to the travelling waves is a maximum when the cavity length is an odd number of 1/4 wavelengths long for which its input impedance is a maximum. Similarly, for an insulated end plate, the power delivered to the travelling waves is a maximum for a cavity with a length equal to an integer number of half wavelengths for which its input impedance is again a maximum.

AB - This paper describes a theoretical and experimental study of surface- and helicon-wave-heated plasma sources in which standing waves are set up in the cavity between the closed end plate to a plasma vessel and a wave launcher while travelling waves propagate from the opposite side of the launcher into a region which is long compared with the attenuation distance of the waves. We model the situation as a lossy transmission line of finite length coupled at the launcher to a lossy transmission line of infinite extent. RF power applied to the launcher divides in the ratio of the input impedances of the two transmission lines. For a conducting end plate, the power delivered to the travelling waves is a maximum when the cavity length is an odd number of 1/4 wavelengths long for which its input impedance is a maximum. Similarly, for an insulated end plate, the power delivered to the travelling waves is a maximum for a cavity with a length equal to an integer number of half wavelengths for which its input impedance is again a maximum.

U2 - 10.1109/TPS.2009.2037740

DO - 10.1109/TPS.2009.2037740

M3 - Article

VL - 38

SP - 62

EP - 72

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

SN - 0093-3813

IS - 2

ER -